Before a nano- or microstructure can be used in a product with a functional surface, the structures must be produced in a mastering process. For this, we have laser interference lithography and UV lithography.

Laser interference lithography / UV lithography

We use laser interference lithography and UV lithography to create many nano- and microstructures. These technologies can be used to master structures with periods between 200 nm and several hundred microns.

Laser interference lithography allows mastering from periodic or stochastic structures seamlessly on a surface of up to 1 m². With UV lithography, microstructures of any geometry can be processed on a surface of up to 20” x 24”.


Contact person

up to

20"x 24"

UV lithography
up to


laser interference lithography